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深紫外探測器
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美國IRD公司，專門制造用于探測紫外、深紫外、真空極紫外和軟X射線光子的探測器。IRD公司是目前唯一能夠制造并商用的用于檢測VUV、EUV檢測的Si探測器生產廠家。可用于紫外、深紫外的探測器有兩大系列:
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- UVG 系列:更加適合于130nm -1100nm 光相關的檢測，可集成制定波長窄帶濾光片
- SXUV系列:適用于高光通量的場合，如UV/EUV脈沖輻射、準分子激光等，脈沖能量密度超過0.1 μJ/cm2。可集成制定波長窄帶濾光片。
- AXUV系列主要用軟X射線、極紫外、X射線、低能離子等輻射探測。詳見輻射探測系列探測器.
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| 光譜響應曲線 |
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| ?UVG系列技術參數（22攝氏度）: |
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?
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Sensitive Area (mm^2)
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Size (mm)
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Package Type
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Shunt Resistance (M-Ohm)
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Dark Current at 50V
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Capacitance at 0V
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Risetime (10-90%)
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UVG100
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100
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10 X 10
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Ceramic
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100
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*
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20 nF**
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10 μSec**
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UVG300
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330
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22 X 15
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Plastic
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20
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*
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40 nF**
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15 μSec**
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UVG20
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20
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5 ?
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TO-8
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1000
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*
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4 nF**
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2 μSec**
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UVG20C
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20
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5 ?
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TO-8
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1000
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*
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4 nF**
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2 μSec**
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UVG20BNC
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20
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5 ?
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BNC
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1000
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*
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2 nF**
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2 μSec**
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UVG20B
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20
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5 ?
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Ceramic
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100
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*
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5 nF**
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1 μSec**
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UVG20HED
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20
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5 ?
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Ceramic
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100
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*
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5 nF**
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1 μSec**
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UVG12
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12
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4 ?
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TO-5
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1000
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*
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2 nF**
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2 μSec**
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UVG10
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10
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10 X 1
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Ceramic
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1000
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*
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2 nF**
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2 μSec**
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UVG12C
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12
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4 ?
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TO-5
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1000
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*
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2 nF**
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2 μSec**
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UVG5 #
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5
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2.5 ?
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TO-5
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1000
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2 nA
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200 pF
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< 2 nSec
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UVG5S
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5
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2.5 ?
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TO-5
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1000
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2 nA
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200 pF
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< 2 nSec
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UVG576
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576
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24 X 24
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Metal
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10
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*
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100 nF
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50 μSec**
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UVGHS1?#
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.05
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.22 X .22
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SMA
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1000
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100 pA
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5 pF
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.25 nSec
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UVGHS2?#
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.05
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.22 X .22
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SSMA
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1000
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100 pA
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5 pF
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.25 nSec
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UVGHS3 #
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.005
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.07 X .07
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SSMA
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1000
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50 pA
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15 pF
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80 pSec
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UVGHS4 #
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.026
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.16 X .16
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SMA
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1000
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100 pA
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150 pF
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200 pSec
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UVGHS5 #
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1
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1 X 1
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SMA
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1000
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200 pA
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400 pF
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700 pSec
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UVGHS6 #
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.00063
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.025 X .025
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SSMA
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1000
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20 pA
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15 pF
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50 pSec
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UVGPS1
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11 (X4)
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7.6 ?
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Metal
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100
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*
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2 nF
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1 μSec**
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UVGPS4S
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1.25 (X4)
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2.5 ?
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Metal
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20
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*
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0.1 nF
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0.5 μSec
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| ?SXUV系列技術參數 |
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?
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Sensitive Area (mm^2)
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Size (mm)
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Package Type
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Shunt Resistance (M-Ohm)
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Dark Current at 50V
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Capacitance at 0V
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Risetime (10-90%)
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SXUV576
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576
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24X24
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Metal
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5
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*
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1000 nF*
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2 μSec**
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SXUV300
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330
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22X15
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Metal
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10
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*
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40 nF*
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15 μSec**
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SXUV300C
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330
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22X15
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Ceramic
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5
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*
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40nF
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15 μSec**
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SXUV100
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100
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10 X 10
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Ceramic
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10
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*
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20 nF**
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10 μSec**
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SXUV100LP
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100
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10 X 10
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Ceramic
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10
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*
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20 nF**
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10 μSec**
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SXUV100LPA
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100
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10 X 10
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Cermaic
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10
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*
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20 nF**
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10 μSec**
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SXUV100RPD***
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100
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10 X 10
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Ceramic
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10
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*
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20 nF**
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10 μSec**
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SXUV20
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20
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5.0 ?
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TO-8
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100
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*
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4 nF**
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2 μSec**
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SXUV20RPD***
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20
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5.0 ?
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TO-8
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100
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*
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4 nF**
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2 μSec**
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SXUV20A
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20
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5.0 ?
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Ceramic
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100
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*
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4 nF**
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2 μSec**
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SXUV20ARPD ***
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20
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5.0 ?
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Ceramic
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100
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*
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4 nF**
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2 μSec**
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SXUV20C
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20
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5.0 ?
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TO-8
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100
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*
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4 nF**
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2 μSec**
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SXUV20BNC
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20
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5.0 ?
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BNC
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100
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*
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4 nF**
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2 μSec**
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SXUV10A
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10
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1 X 10
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C10A
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400
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*
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1 nF**
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0.6 μSec**
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SXUV5 #
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5
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2.5 ?
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TO-5
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200
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20 nA
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200 pF**
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< 2 μSec**
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SXUV5S#
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5
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2.5 ?
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TO-5
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200
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20 nA
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200 pF**
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< 2 μSec**
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產品
